12th International Conference on Semiconductor and Electronics, Kuala Lumpur, 2016

International Conference Smart Sensor and Applications (ICSSA) 2015, Kuala Lumpur, Malaysia

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IEEE Regional Seminar Microelectronic (RSM) 2015, Kuala Trengganu, Malaysia

IEEE TENCON 2015, MACAU, CHINNA

Sensitivity Improvement of Multipath Optical Ring Resonators Using Silicon-On-Insulator Technology

D

P.di

and Y.N. Wijayanto

D. Mahmudin et.al

In this paper, a multi-path optical ring resonator (MpORR) structure on silicon on insulator (SOI) technology is proposed to sensitivity enhancement for chemical liquid sensing applications. It is designed on Silicon Dioxide (SiO2) substrate and Silicon material as the core of optical waveguides. The proposed multi-path optical ring resonator can be realized wide free spectral value (FSR) in order terra-hertz. Therefore, the sensitivity of the sensor can be enhanced. Analysis and optimization of the proposed multi-path optical ring resonator are discussed and reported for optical wavelength operation of 1550.The proposed device can be used for identifying difference liquid material precisely.